NPR9730T (Single-Layer Positive Resist) · BLX-210 (Under Layer for Bi-Layer Process)

NAGASE Lift-Off Photoresists

More Than Two Decades of Manufacturing & Development Expertise

Nagase ChemteX has built a broad portfolio of core technologies through many years of hands-on experience in resist development. These technologies are combined and applied in response to evolving market needs to drive ongoing product innovation.

Our products — developed with a focus on consistent, reliable quality — have supported numerous customers both in Japan and internationally, earning strong recognition across the industry.

Product Lineup

Nagase ChemteX's lift-off photoresist lineup includes two series: the NPR9700 series (single-layer positive resist) and the BLX series (under layer material for bi-layer process).

Single-Layer Positive Resist — NPR9730T

• Positive Resist for Lift-Off Process

• Top and bottom linewidths can be adjusted by varying process conditions

• Exposure wavelength range: g-line to i-line (broadband compatible)

• Easily forms a retrograde profile without special processing

• Easy resist removal

• Film thickness, linewidth, and profile can be customized to meet customer requirements

Under Layer Resist for Bi-Layer Process — BLX-210

• Low-temperature bake (no interlayer mixing at bake temperatures below 140°C)

• Easy resist removal

• Enables finer patterning than single-layer lift-off resists

• Low dispense volume — good coatability with excellent in-plane uniformity

• Fewer defects (low solvent volatility suppresses particle generation during coating)

• Easy undercut control

• Good edge bead removal (EBR) performance

• No interlayer mixing — compatible with most upper-layer resists

Bi-Layer Pattern Profile — Pre-Bake Temperature Dependence

Up to 160°C, the amount of undercut can be controlled by adjusting the pre-bake temperature.

Bottom layer thickness	0.2μm
Pre-bake temperature	145°C, proximity bake
Exposure dose	300mJ/cm2
Pattern size	0.5 μm trench

What NAGASE Offers

Drawing on many years of experience in resist material development, we deliver the precise resist profile each customer needs, tailored process by process. In particular, we offer a wide range of products with ideal properties for the lift-off process.

Services (Examples)

Application Examples

The NPR9700 and BLX series are used across a broad range of industries and application areas.

Manufacturer: Nagase ChemteX Corporation

Nagase ChemteX has evolved into a unique specialty chemical manufacturer with leading market share across many fields, driven by core strengths in synthesis and formulation technologies.

Our products are applied across a wide range of fields including chemicals, electronics, automotive, and aerospace. In the electronics sector, the company maintains production facilities not only in Japan but also in China and the United States, meeting customers' requirements for local production.

Company Overview — Nagase ChemteX Corporation

Distributor: Nagase & Co., Ltd.

Nagase & Co., Ltd. is a specialty chemicals trading company founded in Kyoto in 1832. Securing exclusive distribution rights for world-class products in Japan, the company has leveraged its technical expertise, market intelligence, and global network to expand into manufacturing, processing, and R&D — steadily evolving its business model.

As the company marks its 200th anniversary in 2032, and looks even further ahead, Nagase remains committed to building a society where people can live in comfort, safety, and security.

Company Overview — Nagase & Co., Ltd.